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Teltec Pacific is a technical Sales and Service organisation serving the Semiconductor, Photonics and Optoelectronics Industries in Asia Pacific countries.

AMP- Maskless Lithography Systems


　

Maskless Lithography Systems


　

Intelligent Micro Patterning has developed multiple distinct product lines that are available to help you develop new technological products and solutions. These maskless exposure systems are available for micro-lithographic processing of new and unique devices. Each system offers its own advantages and options that allow you to customize a solution to meet your needs.


　


　

Features:

  • Micro and sub-micro patterning (NEW feature allows for patterning down to 0.6 um on all
    3 of our SF-100 models.)

  • Direct UV Light printing, eliminate expensive photomasks and provide low operational costs

  • Complete design versatility, using PC

  • Open systems architecture to provide turnkey and fully integrated solutions

  • Multi pixel minimum features ensure process repeatability

  • Upgrade allowed to automated substrate handling

  • Widely used in MEMS, Nanotechnology, Biotechnology, Microfluidics


　

 
  SF-100 XCEL  SF-100 XPRESS  SF-100 XTREME
Optics Standard Optics High Resolution Optics High Resolution Optics High Resolution Optics
Reduction Lens None 3X can choose anyone below
　

can choose anyone below

 Standard 3 config. Reduction Lens
4X 10X 20X 4X 10X 20X 4X 10X 20X
Pixel Size (standard filter) 15um 5um 1.25um 0.5um 0.25um 1.25um 0.5um 0.25um 1.25um 0.5um 0.25um
Feature Size (standard filter) 45um 15um 5um 2um 1um 5um 2um 1um 5um 2um 1um
Pixel Size (Sub-micron filter) - - 0.936um 0.390um 0.188um 0.936um 0.390um 0.188um 0.936um 0.390um 0.188um
Feature Size (Sub-micron filter) - - 0.8um 1.17um 0.60um 2.8um 1.17um 0.60um 2.8um 1.17um 0.60um
Overlay accuracy (with theta stage) - - +/-2.5um +/-1.0um +/-0.5um +/-2.5um +/-1.0um +/-0.5um +/-2.5um +/-1.0um +/-0.5um
Stage

No stage

Automated XYZ linear drive stage.

XY travel : 60, 100, 150, 200, 300mm, Z travel 5mm or 25mm
 

or manual screw drive stage XY travel 100mm, Z travel 25mm

 Optional theta stage Standard theta stage
 

or automated linear drive stage, XY travel 60mm, Z travel 5mm

 - -

Size

44" W x 26"D x 30"H

60"W x 26"D x 36"H

or, 44"W x 26"D x 30"H

60"W x 26"D x 36"H


　


　


　


　


　
Patterning down to 0.6 um